Aluminum-coated hollow fibers for UV and VUV light sources
Aluminum thin film is deposted on the inside of glass tubing by MOCVD technique. The fibers shows high transmission efficiency in UV and VUV region dur to high reflectance of aluminum.
Target lasers include XeCl, KrF, ArF, and F2 excimer lasers, and other coherent and incoherent light sources.
- Fiber delivery of XeCl, KrF, ArF, F2 excimer lasers
- Hydrogen lamp spectroscopy
- High transmission in 190-350nm UV and VUV region
- Shorter than 200nm and Visible wavelength region possible
| Fiber type | UVS |
|---|---|
| Wavelength region | 100-350nm (visible is possible） |
| Inner/Outer diameter (um : trelance ±20) | 700/850, 1000/1600 |
| Typical fiber length | 1m |
| Maximum input energy/power *1 | 10mJ 200Hz ArF excimer (1000/1600 dia.) |
| Delivery efficiency *2 | 70% ArF (700/850 dia., 1m length, liner) |
NOTE：
*1 It is influenced by the beam quality and coupling condition of the laser beam.
*2 It is influenced by the input light condion and fiber bending condition.
* The specification may be revised without any notice.
